Title:
TRANSDUCER ELEMENT, METHOD OF PRODUCING SAME AND PRESSURE TRANSDUCER ASSOCIATED WITH TRANSDUCER ELEMENT
Document Type and Number:
Japanese Patent JPS60167385
Kind Code:
A
Abstract:
A piezoresistive transduction element for incorporation into a pressure transducer includes a plate defining a diaphragm zone and preferably of silicon with piezoresistances diffused into it, an insulating plate of a glass material and a base plate. The plates are preferably connected to each other by anodic connections in a series of steps. The base plate is made of a material having substantially the same coefficient of thermal expansion as that of the material of the plate which defines the diaphragm zone. Furthermore, the dimensions of the base plate are matched to those of the diaphragm plate. By these measures the deformation forces exerted by the base plate and diaphragm plate on the insulating plate upon changes in temperature are of substantially the same magnitude and therefore there is minimum bending of the diaphragm plate. A symmetrical transduction element is created which has minimum zero point displacement and minimum sensitivity changes in use. Pressure transducers equipped with such piezoresistive transduction elements are therefore appropriate for high measuring accuracy, particularly in combination with an improved, elastically extensible securement of a holder which carries the transduction element within the transducer housing.
Inventors:
RUNE TANNERU
RETO KARUDERARA
ARUFURETSUDO BUENGAA
HANSU KONRATSUTO ZONDEREGAA
RETO KARUDERARA
ARUFURETSUDO BUENGAA
HANSU KONRATSUTO ZONDEREGAA
Application Number:
JP23740784A
Publication Date:
August 30, 1985
Filing Date:
November 10, 1984
Export Citation:
Assignee:
KISTLER INSTRUMENTE AG
International Classes:
G01L9/00; H01L29/84; G01L9/04; (IPC1-7): G01L9/04; H01L29/84
Attorney, Agent or Firm:
Minoru Nakamura