Title:
TRANSFER ARM DEVICE
Document Type and Number:
Japanese Patent JPS6322285
Kind Code:
A
Inventors:
SUZUKI YASUNOBU
KATO MOTOHIKO
BANDO AKIO
ISHIDA HISAO
NISHIMURA AKIHIRO
YAMAGUCHI HIROSHI
AWAMURA NAOKI
KATO MOTOHIKO
BANDO AKIO
ISHIDA HISAO
NISHIMURA AKIHIRO
YAMAGUCHI HIROSHI
AWAMURA NAOKI
Application Number:
JP16603686A
Publication Date:
January 29, 1988
Filing Date:
July 15, 1986
Export Citation:
Assignee:
SHINKAWA KK
UNION OPTICAL CO LTD
UNION OPTICAL CO LTD
International Classes:
H01L21/677; B25J5/04; H01L21/68; (IPC1-7): B25J5/04; H01L21/68
Domestic Patent References:
| JPS61103791A | 1986-05-22 | |||
| JPS59115188A | 1984-07-03 |
Attorney, Agent or Firm:
Yoshinori Tanabe
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