Title:
TRANSFER DEVICE AND TRANSFER METHOD
Document Type and Number:
Japanese Patent JP2016134526
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a transfer device capable of preventing the up-sizing, and to provide a transfer method.SOLUTION: A transfer device 10 includes conveyance means 20 for taking out a plate-like member WF from housing means CT capable of stacking the plate-like members WF in a direction crossing the surface of the plate-like member WF, and detection means 30 capable of detecting the position of the plate-like member WF taken out by the conveyance means 20. The detection means 30 has surface direction detection means 33 capable of detecting a position in the surface direction of the plate-like member WF, by moving in the stacking direction and approaching the plate-like member WF to be taken out from the housing means CT.SELECTED DRAWING: Figure 1
Inventors:
SUGISHITA YOSHIAKI
Application Number:
JP2015008786A
Publication Date:
July 25, 2016
Filing Date:
January 20, 2015
Export Citation:
Assignee:
LINTEC CORP
International Classes:
H01L21/677; G01B11/00; G01B21/00
Domestic Patent References:
| JPH06177230A | 1994-06-24 | |||
| JP2000040735A | 2000-02-08 | |||
| JP2004214462A | 2004-07-29 | |||
| JP2004196438A | 2004-07-15 | |||
| JP2004193344A | 2004-07-08 | |||
| JP2003254738A | 2003-09-10 |
Foreign References:
| WO2003101677A1 | 2003-12-11 |
Attorney, Agent or Firm:
Intellectual Property Office
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