To make the drive unit of a transfer device be designed compactly.

The one end side of each beam 1 of a pair of beams is connected to a fixed surface 33 with three telescopic arms 3a, 3b, 3c which are turnable in an arbitrary direction of three dimensions, are driven telescopically and cross each other, and the side of the other end is connected to the fixed surface 33 with two telescopic arms 3a, 3b which are turnable in an arbitrary direction, are driven telescopically and cross each other. By making the beam 1 perform the three-dimensional motions of advancing and retreating motion, opening and closing motion and ascending and descending motion by driving these telescopic arms 3a, 3b, 3c telescopically, a linear drive unit having a large size is made unnecessary and the drive unit of the transfer device is designed compactly.