Title:
TRANSFER MACHINE AND BEVEL POLISHING DEVICE
Document Type and Number:
Japanese Patent JP2020104240
Kind Code:
A
Abstract:
To provide an aspect suppressing variation when polishing a bevel of a substrate.SOLUTION: A transfer machine 80 transports a substrate W to a substrate adsorption holding portion 20 holding a back surface of the substrate W. The transfer machine 80 has a pair of hands 810, a supporting member 821 that is provided on the hand 810, and supports the back surface of the substrate W, and holding member 831 that is provided on the hand 810, and holds a side surface of the substrate W supported by the supporting member 821. Three supporting members 821 are provided, and the supporting portion 820 is provided with the two supporting members 821 on the one hand 810, and is provided with the one supporting member 821 on the other hand 810.SELECTED DRAWING: Figure 1
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Inventors:
KAMIMURA KENJI
YAMANOBE HOKUTO
ISHIKAWA SHO
YAMANOBE HOKUTO
ISHIKAWA SHO
Application Number:
JP2018247920A
Publication Date:
July 09, 2020
Filing Date:
December 28, 2018
Export Citation:
Assignee:
EBARA CORP
International Classes:
B24B41/06; B24B9/00; B24B21/08; B24B47/22; H01L21/304; H01L21/677
Domestic Patent References:
| JP2017112291A | 2017-06-22 | |||
| JP2002252268A | 2002-09-06 | |||
| JP2002176093A | 2002-06-21 | |||
| JP2006332543A | 2006-12-07 | |||
| JP2018195853A | 2018-12-06 | |||
| JPS615519A | 1986-01-11 | |||
| JPH11165864A | 1999-06-22 |
Foreign References:
| WO2017104648A1 | 2017-06-22 |
Attorney, Agent or Firm:
Seiji Ohno
Kobayashi Hideyoshi
Hiroyuki Ohno
Koji Morita
Osamu Tsuda
Matsuno Chihiro
Seiichi Sakitani
Hiroshi Nomoto
Kobayashi Hideyoshi
Hiroyuki Ohno
Koji Morita
Osamu Tsuda
Matsuno Chihiro
Seiichi Sakitani
Hiroshi Nomoto