To place an object to be transferred to a placement surface without troubles, even when the placement surface of the object to be conveyed is set lower than the upper surface of a stage.

At the upper part of a delivery position where an object 45 is conveyed by a conveyance arm 70, an elevator unit 26 is arranged, where the elevator unit 26 has three support members 48c that is movable vertically and is rotatable. When the object 45 is transferred to the delivery position, the support members 48c are lowered to a position P3, rotated by a specific angle α, and raised slightly for receiving the object 45 from the arm 70. When the arm 70 is retracted, the support member 48c is lowered to a stage RST, the object 45 is placed onto the stage, the support member 48c is rotated by the prescribed angle α in a direction opposite to the previous case, and is raised to a position P2, thus placing the object to the conveyed on the placement surface without troubles, even when the placement surface of the object is set lower than the upper surface of the stage.