Title:
無人搬送車システムに用いられる移載方法
Document Type and Number:
Japanese Patent JP4133518
Kind Code:
B2
Inventors:
Hiroyuki Ishihara
Takao Shimizu
Takashi Nakao
Ryosuke Tahara
Takao Shimizu
Takashi Nakao
Ryosuke Tahara
Application Number:
JP2003097966A
Publication Date:
August 13, 2008
Filing Date:
April 01, 2003
Export Citation:
Assignee:
Mitsubishi Electric Corporation
Murata Machinery Co., Ltd.
Murata Machinery Co., Ltd.
International Classes:
B65G1/00; B65G49/06; B65G49/00; B65G49/07; F24F7/06; F24F9/00; H01L21/02; H01L21/677; H01L21/68
Domestic Patent References:
| JP10218318A |
Attorney, Agent or Firm:
Juichiro Yano