Title:
トランジスタの製造方法
Document Type and Number:
Japanese Patent JP5253006
Kind Code:
B2
Inventors:
Hiroyuki Ueda
Osamu Ishiguro
Tsutomu Uesugi
Toru Kachi
Masahiro Sugimoto
Osamu Ishiguro
Tsutomu Uesugi
Toru Kachi
Masahiro Sugimoto
Application Number:
JP2008156472A
Publication Date:
July 31, 2013
Filing Date:
June 16, 2008
Export Citation:
Assignee:
Toyota Central R & D Labs.
TOYOTA JIDOSHA KABUSHIKI KAISHA
TOYOTA JIDOSHA KABUSHIKI KAISHA
International Classes:
H01L21/336; H01L21/205; H01L29/78; H01L29/786
Domestic Patent References:
| JP6232451A | ||||
| JP10256556A | ||||
| JP2000174283A |
Attorney, Agent or Firm:
Kaiyu International Patent Office