TRANSISTOR WITH OPTICAL GATE AND PREPARATION THEREOF

Japanese Patent JPH0737545

A

PURPOSE: To increase mobility of electrons by connecting one of two electrodes with a power supply of an electron emission electrode, and by controlling quantity of the current within an electron collection electrode by the intensity of optical signals. CONSTITUTION: Under the conditions of a vacuum or the atmosphere, a first conductive electrode 6 which is an electron emission electrode is spatially isolated from a second conductive electrode 7 which is an electron collection electrode, and a light source 8 which is an optical signal radiation electrode is formed on the electrode 6. Now, when an optical signal having more than critical energy is radiated from the light source 8 to the electrode 6, electrons are emitted from the surface of the electrode 6 and reach the electrode 7. Then, an insulating layer 10 are formed on a main surface of a silicone substrate 9, and an electrode pattern regulated by an electron emission electrode 11 and an electron collection electrode 12 is formed on the insulating layer 9. The electrodes 11, 12 have etched concave parts, and a pointed shape at the concave parts, and the electron flow emission will be easy. Also a concave part is formed when the insulating layer 10 is removed, the opposite ends of the electrodes 11, 12 are spatially isolated. Thus, mobility of electrons can be increased.

SUN UON KAN
JIN YON KAN

JP31873093A

February 07, 1995

December 17, 1993

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KORIA ELECTRON & TELECOMMUN RE

H01J1/34; H01J9/12; H01J17/06; H01J19/24; H01J21/06; H01J21/04; H01J40/16; H01L21/331; H01L31/12; (IPC1-7): H01J40/16; H01J1/34; H01J9/12; H01L31/12

JPH0384968A	1991-04-10
JPH04226087A	1992-08-14
JPH04279066A	1992-10-05
JPH03261040A	1991-11-20
JPH0340332A	1991-02-21

Kenzo Hara

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