Title:
TRANSMISSION ELECTRON MICROSCOPE
Document Type and Number:
Japanese Patent JP3849353
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To suppress an increase in the height of an energy filter transmission electron microscope (EF-TEM) and to enhance basic performances by forming the real image of an image on the input image plane of an energy filter different from the image formed on the input crossover plane of a diffraction pattern or sample image.
SOLUTION: A fourth intermediate lens 15 is disposed between an incident crossover plane 44 and an energy filter 26 and a fourth intermediate diffraction pattern 63 formed as a real image is formed on the position of an the incident crossover plane 44 as a fifth intermediate diffraction pattern 64 is a virtual image. At the same time, a fourth intermediate magnified image 53 is formed on the position of an incident image plane 45 as a fifth intermediate image 54 as a real image. A pseudo sample image is formed on the crossover plane 44 of the energy filter 26 so that optical conditions required for the energy filter can be satisfied and a lens can be disposed between the input image plane and the input crossover plane of the energy filter.
Inventors:
Yoshifumi Taniguchi
Application Number:
JP17368999A
Publication Date:
November 22, 2006
Filing Date:
June 21, 1999
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01J37/26; H01J37/05; H01J37/14; H01J37/147; (IPC1-7): H01J37/26; H01J37/05; H01J37/14; H01J37/147
Domestic Patent References:
| JP6042358B2 | ||||
| JP10241627A | ||||
| JP9213263A | ||||
| JP5128986A | ||||
| JP58032347A | ||||
| JP6162977A | ||||
| JP62229749A | ||||
| JP61181052A |
Attorney, Agent or Firm:
Manabu Inoue