Title:
TRANSMISSION SMALL-ANGLE X-RAY SCATTERING METROLOGY SYSTEM AND METHOD
Document Type and Number:
Japanese Patent JP2023178307
Kind Code:
A
Abstract:
To provide techniques for characterizing dimensions and material properties of semiconductor devices by transmission small-angle x-ray scatterometry (TSAXS) systems.SOLUTION: An x-ray beam is focused closer to a wafer surface for relatively small targets and closer to a detector for relatively large targets. A high resolution detector with a small point spread function (PSF) is employed to mitigate detector PSF limits on achievable Q resolution. The detector locates an incident photon with sub-pixel accuracy by determining the centroid of a cloud of electrons stimulated by a photon conversion event. The detector resolves one or more x-ray photon energies in addition to location of incidence.SELECTED DRAWING: Figure 1
Inventors:
ANDREI SHCHEGROV
ANTONIO GELLINEAU
SERGEY ZALUBOVSKY
ANTONIO GELLINEAU
SERGEY ZALUBOVSKY
Application Number:
JP2023164224A
Publication Date:
December 14, 2023
Filing Date:
September 27, 2023
Export Citation:
Assignee:
KLA CORP
International Classes:
G01N23/201; G01B15/00; H01L21/66
Attorney, Agent or Firm:
Patent Attorney Corporation YKI International Patent Office
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