Title:
透過型小角散乱装置
Document Type and Number:
Japanese Patent JP7401131
Kind Code:
B2
Abstract:
A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a θ-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm 11 being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unit 20 is installed on a lower-side end portion of the rotation arm 11, and a two-dimensional X-ray detector 30 is installed on an upper-side end portion of the rotation arm 11 to form a vertical arrangement structure.
Inventors:
Naoki Matsushima
Kiyoshi Ogata
Tadashi Yoshihara
Yoshiyasu Ito
Kazuhiko Omote
Hiroshi Motono
Shigematsu Asano
Katsutaka Horata
Chisui Yasuda
Kiyoshi Ogata
Tadashi Yoshihara
Yoshiyasu Ito
Kazuhiko Omote
Hiroshi Motono
Shigematsu Asano
Katsutaka Horata
Chisui Yasuda
Application Number:
JP2022210973A
Publication Date:
December 19, 2023
Filing Date:
December 27, 2022
Export Citation:
Assignee:
Rigaku Corporation
International Classes:
G01B15/00; G01N23/20025; G01N23/201; H01L21/66
Domestic Patent References:
| JP2005221362A | ||||
| JP2005221363A | ||||
| JP2004177248A |
Foreign References:
| US20170307548 | ||||
| US20180113084 | ||||
| WO2007026461A1 | ||||
| WO2018016430A1 |
Other References:
X線・中性子小角散乱で何がわかるか?,SPring-8産業利用研究会(第26回)-放射光X線による金属材料評価技術-,日本,2008年12月09日
Attorney, Agent or Firm:
Toshitake Yamamoto
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