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Title:
TRANSPARENT ELECTRICALLY CONDUCTIVE FILM AND TRANSPARENT ELECTRICALLY CONDUCTIVE BASE MATERIAL COMPRISING THE SAME
Document Type and Number:
Japanese Patent JP2007113026
Kind Code:
A
Abstract:

To provide a transparent electrically conductive film having high light transmittance in the wavelength of ≤400 nm, and to provide a transparent electrically conductive base material comprising the same.

The transparent electrically conductive film is an oxide film obtained by a d.c. sputtering process using, as a sputtering target, an oxide sintered compact mainly comprising gallium, indium and oxygen, and in which the atomic ratio of the gallium to the indium is 0.97 to <1.86, and mainly composed of a gallium indium oxide phase (β-GaInO3 phase) with a β-Ga2O3 type structure and an indium oxide phase (In2O3 phase) with a bixbyite type structure, and also, in which the X-ray diffraction peak intensity ratio defined by the formula of In2O3 phase (400)/β-GaInO3 phase (111)×100 [%] is ≤45%, and density is ≥5.8 g/cm3, and is an amorphous film mainly comprising gallium, indium and oxide, and in which the atomic ratio of the gallium to the indium is 0.97 to <1.86, and in which the shortest wavelength at which the permeability of the film itself other than a substrate shows 50% is ≤350 nm.


Inventors:
NAKAYAMA NORIYUKI
ABE TAKAYUKI
Application Number:
JP2005302832A
Publication Date:
May 10, 2007
Filing Date:
October 18, 2005
Export Citation:
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Assignee:
SUMITOMO METAL MINING CO
International Classes:
C23C14/08; C04B35/00; C23C14/34; H01B5/14
Domestic Patent References:
JPH07182924A1995-07-21
JPH09259640A1997-10-03
JP2002093243A2002-03-29
Attorney, Agent or Firm:
Yasushi Shinohara
Masayuki Fujinaka