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Title:
TRANSPORT DEVICE FOR PLATE-LIKE BODY
Document Type and Number:
Japanese Patent JP2012064644
Kind Code:
A
Abstract:

To provide a transport device for a plate-like body by which damage on the plate-like body can be prevented reliably even when the plate-like body which is thin is transported.

A transport device 1 for a plate-like body comprises a holding member 10 which sticks to and holds a plate-like body P from above, and a support member 20 which supports the holding member 10 movably. The holding member 10 is provided with an injection port 12a arranged annularly on the lower surface side facing the plate-like body P, and an atmosphere opening port 12c which opens a space S formed between a lower surface side central portion 10a surrounded by the injection port 12a and the plate-like body P to the atmosphere. The injection port 12a is formed so as to inject gas toward the outer edge of the plate-like body P.


Inventors:
MATSUSHITA TOMOO
Application Number:
JP2010205570A
Publication Date:
March 29, 2012
Filing Date:
September 14, 2010
Export Citation:
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Assignee:
MATSUSHITA TOMOO
International Classes:
H01L21/677; B23Q3/08; B23Q7/04; B65G49/07
Domestic Patent References:
JP2006182544A2006-07-13
Attorney, Agent or Firm:
Shinichi Mashita