To provide a transport device for a plate-like body by which damage on the plate-like body can be prevented reliably even when the plate-like body which is thin is transported.
A transport device 1 for a plate-like body comprises a holding member 10 which sticks to and holds a plate-like body P from above, and a support member 20 which supports the holding member 10 movably. The holding member 10 is provided with an injection port 12a arranged annularly on the lower surface side facing the plate-like body P, and an atmosphere opening port 12c which opens a space S formed between a lower surface side central portion 10a surrounded by the injection port 12a and the plate-like body P to the atmosphere. The injection port 12a is formed so as to inject gas toward the outer edge of the plate-like body P.
JP2006182544A | 2006-07-13 |