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Title:
TRANSPORT DEVICE OF SHEET SUBSTRATE
Document Type and Number:
Japanese Patent JP2018106197
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To correct error occurred in a scale for position detection when detecting a position in a circumferential direction of a cylindrical member.SOLUTION: A first reading part that is arranged facing a scale and reads a scale; a second reading part that faces the scale, is arranged at an angle position different from the first reading part in the circumferential direction of the cylindrical member and reads the scale; a memory part where a scale part successively memorizes a difference from a scale reading value for every rotation of a predetermined rotation angle α that is not a divisor of 360 degree, and memorizes error information regarding a pitch error of the scale over an entire circumference of the scale part; and a correction part that outputs a value obtained by correcting at least one of the scale reading value due to the first reading part and the scale reading value due to the second reading part based on error information as a transportation position or a conveyance amount in the longitudinal direction of the sheet substrate are included.SELECTED DRAWING: Figure 4

Inventors:
HORI MASAKAZU
KITO YOSHIAKI
SUZUKI TOMOYA
WATANABE TOMOYUKI
HAYASHIDA YOSUKE
KATO MASANORI
Application Number:
JP2018037938A
Publication Date:
July 05, 2018
Filing Date:
March 02, 2018
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G03F9/00; B65H20/02; B65H23/18; B65H43/00; G03F7/20; G03F7/24; H01L21/68
Domestic Patent References:
JP2013200463A2013-10-03
JP2012207923A2012-10-25
JP2000258186A2000-09-22
JP2014102444A2014-06-05
JP2003262518A2003-09-19
JP2008145299A2008-06-26
JP2007064771A2007-03-15
Attorney, Agent or Firm:
Sakai International Patent Office