Title:
搬送装置、処理装置、および搬送方法
Document Type and Number:
Japanese Patent JP6681182
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a technology of moving a stage while delivering the stage between a plurality of moving mechanisms in a transport device for transporting an object placed on the stage.SOLUTION: A transport device 1 includes a stage 10 for placing an object 9, rails 21-23 for guiding the stage 10 in a moving direction, and a plurality of moving mechanisms 31, 33 for moving the stage 10 in different directions from each other. Each of the moving mechanisms 31, 33 includes a fixing part fixed on the stage 10, and an attaching/detaching mechanism 55 for attaching/detaching the fixing part to/from the stage 10. Therefore, the stage 10 can be moved while the stage 10 is delivered between the plurality of moving mechanisms 31, 33.SELECTED DRAWING: Figure 3
Inventors:
Takumi Yoshida
Iwao Tanaka
Iwao Tanaka
Application Number:
JP2015237083A
Publication Date:
April 15, 2020
Filing Date:
December 04, 2015
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
B65G25/06
Domestic Patent References:
| JP2014200887A | ||||
| JP2011189999A | ||||
| JP2009166936A | ||||
| JP3128813A |
Attorney, Agent or Firm:
Takami Nishida