PURPOSE: To provide a semiconductor substrate transport apparatus which stably transports a semiconductor substrate and contributes to space saving, a semiconductor processing apparatus which firmly supports a semiconductor substrate, and an automatic processing equipment composed of the semiconductor transport and processing apparatuses.

CONSTITUTION: At least one of substrate chucking members 72-75 equipped on a transport means 24, for example, a substrate chucking member 74 supports a semiconductor substrate 22 from under; the rest of the members 72, 73 and 75 chuck the side ends of the semiconductor substrate 22. This saves space. A substrate receiving stage 8 of a semiconductor substrate processing apparatus has its margin for supporting a semiconductor substrate 22 enlarged, which provides firm support.