Title:
TRANSPORT VESSEL INCLUDING FLOW DISTRIBUTOR
Document Type and Number:
Japanese Patent JP2017210683
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a transport vessel for improving precursor availability in the vessel for a sedimentation process, and cleaning and replenishment of the vessel; and to provide a system, and a method of its application.SOLUTION: A container is designed in such a structure that carrier gas is transported from a flow distributor. The flow distributor includes a plurality of small openings (exhaust nozzles), and carrier gas enters a precursor chamber therethrough, collides with the surface of the chemical precursor, to thereby generate steam.SELECTED DRAWING: None
Inventors:
BIRTCHER CHARLES MICHAEL
JAMES PATRICK NEHLSEN
SERGEI VLADIMIROVICH IVANOV
THOMAS ANDREW STEIDL
KANG KAI
BAILEY III WADE HAMPTON
JAMES PATRICK NEHLSEN
SERGEI VLADIMIROVICH IVANOV
THOMAS ANDREW STEIDL
KANG KAI
BAILEY III WADE HAMPTON
Application Number:
JP2017095354A
Publication Date:
November 30, 2017
Filing Date:
May 12, 2017
Export Citation:
Assignee:
VERSUM MAT US LLC
International Classes:
C23C16/448; B01J4/00; B01J7/00
Domestic Patent References:
| JP2012251179A | 2012-12-20 | |||
| JPS6314856A | 1988-01-22 | |||
| JP2009526134A | 2009-07-16 | |||
| JP2013509736A | 2013-03-14 | |||
| JP2014012888A | 2014-01-23 | |||
| JP2001059178A | 2001-03-06 | |||
| JP2016036011A | 2016-03-17 | |||
| JP2003197542A | 2003-07-11 |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Atsushi Ebiya
Naori Kota
Satoshi Deno
Kenji Kimura
Takashi Ishida
Tetsuji Koga
Atsushi Ebiya
Naori Kota
Satoshi Deno
Kenji Kimura