Title:
搬送物浮上装置及びこれを用いたステージ装置
Document Type and Number:
Japanese Patent JP5312760
Kind Code:
B2
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Inventors:
Kentaro Kobayashi
Application Number:
JP2007187392A
Publication Date:
October 09, 2013
Filing Date:
July 18, 2007
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
B65G51/03; B65G7/06; B65G49/06; H01L21/677
Domestic Patent References:
| JP2006306549A | ||||
| JP2006273576A | ||||
| JP62185026U |
Attorney, Agent or Firm:
Tadahiko Ito