Title:
TRANSPORTING DEVICE
Document Type and Number:
Japanese Patent JP3290215
Kind Code:
B2
Abstract:
PURPOSE: To provide a transporting device capable of supplying electric power to the drive means of a holding part without providing long wiring along a transporting arm.
CONSTITUTION: A transporting device is provided with a transporting arm 11, a hand 12 which is located at the top of the transporting arm 11 and provided with a holding part 14 for holding a semi-conductor wafer 5, a solenoid valve 19 which is located on the hand 12 and drives the holding part 14, and a solar cell 20 which is located on the hand 12 and converts light energy into electric energy to supply it to the solenoid valve 19 by receiving light.
Inventors:
Hideo Furushima
Shinichi Mitani
Shinichi Mitani
Application Number:
JP30384292A
Publication Date:
June 10, 2002
Filing Date:
November 13, 1992
Export Citation:
Assignee:
Toshiba Machine Co., Ltd.
International Classes:
B25J15/08; B25J19/00; B65G1/00; B65G1/06; B65G49/07; H01L21/677; H01L21/68; (IPC1-7): B25J19/00; B25J15/08; H01L21/68
Domestic Patent References:
| JP6478791A | ||||
| JP63114888A |
Attorney, Agent or Firm:
Takehiko Suzue