Title:
トラップ装置
Document Type and Number:
Japanese Patent JP4495271
Kind Code:
B2
Inventors:
Masaharu Miki
Yuji Tanaka
Kenji Yamaguchi
Yuji Tanaka
Kenji Yamaguchi
Application Number:
JP15370699A
Publication Date:
June 30, 2010
Filing Date:
June 01, 1999
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
B01D45/08; C23C16/44; B01D8/00; B01D53/46; H01L21/31
Domestic Patent References:
| JP2111403A | ||||
| JP5202474A | ||||
| JP9225230A |
Attorney, Agent or Firm:
Takehiko Suzue
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura