Title:
TRAVELING TABLE UNIT
Document Type and Number:
Japanese Patent JPS5481781
Kind Code:
A
Abstract:
PURPOSE:To fulfill high-precision table traveling and positioning without high- precision alignment and fabrication. CONSTITUTION:Phosphor bronze spring piece 7a which is elastic in the Y direction perpendicular to the traveling direction. In addition, spring piece 7c which is elastic in the Z direction perpendicular to the X direction is connected via a board. Then, the other terminal of spring piece 7c is connected to X table 3. In this structure, rod 8 and table 3 can be connected together with precision even if motor 15, the traveling control system at scerew 10 side and table 5 at table 3 side are different in size one another. Since the flexible shaft of connection part 7 is elastic in traveling direction, the movement of the rod is transmitted to table 3 accurately. Highly-precise positioning can therefore be attained only by precisely forming the XY table 5 side and traveling control system side separately.
Inventors:
HORI KOUHEI
Application Number:
JP14877377A
Publication Date:
June 29, 1979
Filing Date:
December 13, 1977
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
F16C3/02; F16F1/18; H01L21/027; H01L21/68; (IPC1-7): H01L21/68