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Title:
TREATMENT EQUIPMENT, TREATMENT METHOD AND HEAT ACCUMULATOR
Document Type and Number:
Japanese Patent JP2007101021
Kind Code:
A
Abstract:

To efficiently heat inside of a treatment furnace even if an endothermic reaction occurs.

The treatment equipment 1 for treating an object to be treated by the endothermic reaction consists of a treatment furnace 2 into which the object to be treated is charged, a supply route 3 for supplying treatment gas into the treatment furnace 2 and an exhaustion route 4 for exhausting exhaust gas from the inside of the treatment furnace 2 as well as a heater 11 for heating the treatment gas. In addition, the exhaustion route 4 is provided with the heat accumulator 15 for accumulating heat of the exhaust gas and a heat exchanger 10 for conducting heat exchange between the exhaust gas passed through the heat accumulator 15 and the treatment gas passing through the supply route 3.


Inventors:
OKAZAKI KENYA
SUGIURA YOJI
NINOMIYA TAKASHI
Application Number:
JP2005289243A
Publication Date:
April 19, 2007
Filing Date:
September 30, 2005
Export Citation:
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Assignee:
DOWA HOLDINGS CO LTD
International Classes:
F27D17/00; C21B13/00; C22B5/12; F28D20/00
Domestic Patent References:
JP2002020813A2002-01-23
JP2003064422A2003-03-05
JPH11106811A1999-04-20
JPH06159953A1994-06-07
JPH0276511U1990-06-12
JP2001272180A2001-10-05
JPH08247409A1996-09-27
Attorney, Agent or Firm:
Koji Hagiwara
Tetsuo Kanamoto
Miaki Kametani
Kenji Wada



 
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