TREATMENT OF LAMINATED FILMS

Title:

TREATMENT OF LAMINATED FILMS

Document Type and Number:

Japanese Patent JPH08222544

Kind Code:

A

Abstract:

PURPOSE: To provide a method for treating laminated films capable of preventing the peeling off and/or the corrosion of upper layer films due to residual chlorine.

CONSTITUTION: A treatment surface 15 is formed through etching using a reactive gas containing chlorine. The treatment surface 15 is irradiated with plasma of alcohol or the treatment surface 15 is exposed to a radical of a silicon compound to carry out a cleaning treatment for removing the chlorine A kept adsorbed by the treatment surface 15. An upper layer films 19 are formed on the treatment surface 15. Thus, the chlorine A is prevented from remaining between the treatment surface 15 and the upper layer films 19.

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Inventors:

KIYOTA HISAHARU

Application Number:

JP2359395A

Publication Date:

August 30, 1996

Filing Date:

February 13, 1995

Export Citation:

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Assignee:

SONY CORP

International Classes:

C23C16/02; C23F4/00; H01L21/203; H01L21/205; H01L21/302; H01L21/304; H01L21/3065; (IPC1-7): H01L21/3065; C23C16/02; C23F4/00; H01L21/203; H01L21/205; H01L21/304

Attorney, Agent or Firm:

Kuninori Funabashi

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