Title:
TREATMENT OF NITROGEN TRIFLUORIDE-CONTAINING EXHAUST GAS
Document Type and Number:
Japanese Patent JP3269565
Kind Code:
B2
Abstract:
PURPOSE: To improve the defect of a nitrogen trifluoride (NF3)containing exhaust gas treatment method provided heretofore and to simply and efficiently treat NF3-containing exhaust gas to reduce the concn. of NH3 to a level not generating a problem from the aspect of air pollution or working environment.
CONSTITUTION: Exhaust gas containing nitrogen trifluoride (NF3) is brought into contact with a mixture consisting of activated carbon and metal oxide at 200-600°C to be reacted therewith to be made harmless.
Inventors:
Itsuo Orihara
Moriyuki Fukushima
Shiro Sato
Moriyuki Fukushima
Shiro Sato
Application Number:
JP17224391A
Publication Date:
March 25, 2002
Filing Date:
July 12, 1991
Export Citation:
Assignee:
Kanto Denka Kogyo Co., Ltd.
International Classes:
B01D53/86; B01J21/18; B01J23/06; B01J23/74; B01J23/745; (IPC1-7): B01D53/86; B01J21/18; B01J23/06; B01J23/745
Domestic Patent References:
| JP2303524A | ||||
| JP1258746A | ||||
| JP1261206A |
Attorney, Agent or Firm:
Kazuo Shamoto (5 outside)
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