Title:
TRIAXIAL DETECTION ANGULAR VELOCITY SENSOR
Document Type and Number:
Japanese Patent JP2012093154
Kind Code:
A
Abstract:
To provide a triaxial detection angular velocity sensor that can detect an angular velocity in triaxial directions, namely X-axis, Y-axis, and Z-axis.
A triaxial detection angular velocity sensor according to the present invention can detect an angular velocity in triaxial directions, namely X-axis, Y-axis, and Z-axis by providing an angular velocity sensor element 20 for detecting Y-axis and Z-axis, and a tuning-fork type angular velocity sensor element 70 for detecting X-axis extending in an X-axis direction, which element 70 is provided separate from the element 20.
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Inventors:
NAKAJIMA KOICHIRO
UEDA SHINJIRO
YAMAZAKI TOSHIO
MAEKAWA YUKI
UEDA SHINJIRO
YAMAZAKI TOSHIO
MAEKAWA YUKI
Application Number:
JP2010239252A
Publication Date:
May 17, 2012
Filing Date:
October 26, 2010
Export Citation:
Assignee:
PANASONIC CORP
International Classes:
G01C19/56; G01C19/5621; G01C19/5628; H01L29/84; H01L41/08; H01L41/18; H01L41/22; H01L41/39
Attorney, Agent or Firm:
Hiroki Naito
Daisuke Nagano
Kentaro Fujii
Daisuke Nagano
Kentaro Fujii
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