Title:
TRIODE-TYPE HOT CATHODE IONIZATION VACUUM GAUGE
Document Type and Number:
Japanese Patent JP2006343305
Kind Code:
A
Abstract:
To enhance the degassing effect of an inner electrode of a measurement tube and that of a measurement-tube inner wall in a triode-type hot cathode ionization vacuum gauge.
In this triode-type hot cathode ionization vacuum gauge, an ion collector electrode 7 is given a helical shape to connect both ends of the electrode to lead-in terminals 12 and 13. Electric power is supplied to a lead-in electrode to heat the ion collector electrode.
Inventors:
IIJIMA YOSHIO
Application Number:
JP2005213394A
Publication Date:
December 21, 2006
Filing Date:
June 09, 2005
Export Citation:
Assignee:
TOYO DENSHI KENKYUSHO KK
International Classes:
G01L21/32
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