PURPOSE: To facilitate installation and removal, fixing and wiring connection together elimination of dusting characteristics so as to enable repetitive use by embedding a heater wire in a thick-walled part of a supporting body made of a predetermined material provided with an opening notch for installation of any attachment on its side face.
CONSTITUTION: An opening notch 1 for installing in pipings or the like is provided on the side face of an elastic thick-wall cylindrical supporting body 2 made of a rubber or a synthetic resin material, and a heater wire 5 embedded in the thick-walled part 3 so as to form a cylindrical heater, so that impurities such as moisture or the like absorbed on the inner surfaces of a high purity gas piping or cylindrical filters used in a semiconductor production process are heated and removed. This constitution provides a cylindrical heater by which installation and removal, fixing and wiring connection are facilitated together with elimination of dusting characteristics resulting so as to enable repetitive use.
OTSUKA KENJI
TAKAHASHI HIROSHI
NAKAMURA HIROKAZU
