Title:
WAVELENGTH VARIABLE FILTER, METHOD FOR CONTROLLING WAVELENGTH VARIABLE FILTER, AND COMPUTER PROGRAM
Document Type and Number:
Japanese Patent JP2022098653
Kind Code:
A
Abstract:
To stabilize control of changing the wavelength of transmitted light in a wavelength variable filter.SOLUTION: A wavelength variable filter is controlled which comprises opposing two reflection coatings and an actuator unit that changes the relative positions of the coatings. The actuator unit includes a first actuator that is driven according to a target distance between the two reflection coatings, and a second actuator that is feedback-controlled according to the target distance and a detection value of the distance between the two reflection coatings. A control method includes steps of: (a) receiving a new target distance between the two reflection coatings; (b) driving the first actuator according to the new target distance; and (c) feedback-controlling the second actuator according to the new target distance and the detection value of the distance between the two reflection coatings. When a predetermined condition is satisfied, the method starts the step (c) after the lapse of a predetermined threshold time from the start of the step (b).SELECTED DRAWING: Figure 10
Inventors:
KASAHARA HIDEAKI
HIROKUBO NOZOMI
HIROKUBO NOZOMI
Application Number:
JP2020212170A
Publication Date:
July 04, 2022
Filing Date:
December 22, 2020
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G02B26/00; B81B3/00
Attorney, Agent or Firm:
Patent Attorney Corporation Meisei International Patent Office