波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、電子機器、及び波長可変干渉フィルターの駆動方法

Title:

波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、電子機器、及び波長可変干渉フィルターの駆動方法

Document Type and Number:

Japanese Patent JP5888080

Kind Code:

B2

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Inventors:

Akiyuki Nishimura

Application Number:

JP2012089971A

Publication Date:

March 16, 2016

Filing Date:

April 11, 2012

Export Citation:

Assignee:

Seiko Epson Corporation

International Classes:

G02B26/00; B81B3/00

Domestic Patent References:

Attorney, Agent or Firm:

Masahiko Ueyanagi
Osamu Suzawa

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