Title:
TUNABLE OPTICAL FILTER, OPTICAL MODULE, AND ELECTRONIC DEVICE
Document Type and Number:
Japanese Patent JP2016035486
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a tunable optical filter capable of suppressing the relative inclination of a first reflection surface and a second reflection surface facing each other.SOLUTION: A tunable optical filter comprises: a fixed substrate 14 that includes a first reflection surface 33a and a first line 34; and a movable substrate 13 that includes a second reflection surface 37a facing the first reflection surface 33a and a second line 44, the movable substrate 13 includes a movable portion 13b in which the second reflection surface 37a is installed; a plurality of beam portions 36 supporting the movable portion 13b; and a frame portion 13c connected to the beam portions 36, the first line 34 is connected to the second line 44 on a first conductive film terminal 32 and a second conductive film terminal 42, and a fixing portion 56 fixing the fixed substrate 14 to the frame portion 13c is located between a first connection location 57, a second connection location 58 in which the beam portions 36 are connected to the frame portion 13c and the first conductive film terminal 32, the second conductive film terminal 42.SELECTED DRAWING: Figure 5
Inventors:
NISHIMURA AKIYUKI
Application Number:
JP2014157459A
Publication Date:
March 17, 2016
Filing Date:
August 01, 2014
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G02B26/00; G01J3/26; G01J3/51
Attorney, Agent or Firm:
Kazuaki Watanabe
Keisuke Nishida
Keisuke Nishida
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