Title:
TUNABLE THIN-FILM CAPACITOR
Document Type and Number:
Japanese Patent JP2003045748
Kind Code:
A
Abstract:
To provide a tunable thin-film capacitor which has a high Q-value and is superior in reliability.
This tunable thin-film capacitor comprises a lower electrode layer 2 formed on a substrate 1, a thin film dielectric layer 3 formed on the lower electrode layer 2, an upper electrode layer 4 consisting of a low-resistance conductor formed on the thin film dielectric layer 3, a sticking layer 5 consisting of Pt and/or Pd made on that upper electrode layer 4, external terminals 7 and 8 formed on that tightly adhered layer 5, and a protective film 6.
Inventors:
YASHIMA YUKIHIKO
Application Number:
JP2001226648A
Publication Date:
February 14, 2003
Filing Date:
July 26, 2001
Export Citation:
Assignee:
KYOCERA CORP
International Classes:
H01G7/06; (IPC1-7): H01G7/06