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Title:
TURBO-MOLECULAR PUMP WITH DYNAMIC MAGNETIC BEARING
Document Type and Number:
Japanese Patent JPH1084694
Kind Code:
A
Abstract:

To make it possible to brake a rotor rotor under control effectively and automatically at emergency time.

A turbo-molecular pump has a sealed container 100 including an inner vertical supporting member for supporting a hollow rotor through a dynamic magnetic bearing. The hollow rotor with a fixed fin is driven by an n-phase brushless motor, where n is an integer. In the container 100, at least one of emergency resistors 131 to 133 and a connecting means are provided. The emergency resistors 131 to 133 are connected automatically with the n-number of phases of the electric motor if an outer control module 10 for controlling the electric motor and the magnetic bearing is out of order or a defect in the cable is caused between the outer control module 10 and the sealed container 100. Then, the electric motor is operated as a generator, and an electrical braking means for the hollow rotor is provided.


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Inventors:
BRUNET MAURICE
SCHROEDER ULRICH
Application Number:
JP9358797A
Publication Date:
March 31, 1998
Filing Date:
April 11, 1997
Export Citation:
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Assignee:
MECH MAGNETIQUE SOC
International Classes:
F04D19/04; F04D27/02; F16C32/04; H02K7/09; H02P6/24; (IPC1-7): H02P6/24; F04D19/04; F16C32/04; H02K7/09
Domestic Patent References:
JPH06253523A1994-09-09
JPH0389879A1991-04-15
JPH05153749A1993-06-18
JPH048185A1992-01-13
JPH0775365A1995-03-17
JPS63206186A1988-08-25
JPS645387A1989-01-10
JPS5421512A1979-02-17
Attorney, Agent or Firm:
Takashi Ishida (3 others)



 
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