Title:
静電荷の制御機能を備えるターボ分子ポンプ
Document Type and Number:
Japanese Patent JP2009504987
Kind Code:
A
Abstract:
The present invention relates to turbomolecular vacuum pumps and an arrangement for reducing or eliminating an accumulated static charge in the rotor caused by an interaction of the rotor with either electrically charged or neutral particles in the pumped media. Electrical charge exchange between the rotor and the electrically grounded stator is effected through a wire or other means of electrical contact, or through charge emission devices such as a field emission tip. In either case, electrostatic charges in the rotor are reduced or eliminated.
Inventors:
Frank Jansen
Application Number:
JP2008527126A
Publication Date:
February 05, 2009
Filing Date:
August 16, 2006
Export Citation:
Assignee:
Edwards Vacuum Incorporated
International Classes:
F04D19/04
Attorney, Agent or Firm:
Kazuo Shamoto
Shinjiro Ono
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Tatsumi Ono
Shinjiro Ono
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Tatsumi Ono