Title:
TURBO MOLECULAR PUMP
Document Type and Number:
Japanese Patent JP2005036798
Kind Code:
A
Abstract:
To provide a turbo molecular pump in which the number of structural parts is apparently reduced as compared with the usual structure.
The turbo molecular pump includes rotor disks (14) and stator disks (16), the stator disks (16) being held by spacer rings (18, 19) with space interposed therebetween. The spacer rings (18, 19) are fixedly connected to their adjacent rings, thereby securing and centering the stator disks (16) as a whole.
Inventors:
JOERG STANZELL
Application Number:
JP2004164365A
Publication Date:
February 10, 2005
Filing Date:
June 02, 2004
Export Citation:
Assignee:
PFEIFFER VACUUM GMBH
International Classes:
F04D19/04; F04D29/54; (IPC1-7): F04D19/04
Domestic Patent References:
| JPH1162879A | 1999-03-05 | |||
| JPH11201083A | 1999-07-27 | |||
| JPH04330397A | 1992-11-18 | |||
| JP2001153087A | 2001-06-05 | |||
| JPH02131089U | 1990-10-30 |
Foreign References:
| US2610786A | 1952-09-16 |
Attorney, Agent or Firm:
Kazuo Shamoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
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