Title:
TURBO-MOLECULAR PUMP
Document Type and Number:
Japanese Patent JP2006233978
Kind Code:
A
Abstract:
To provide a turbo-molecular pump applied with a rotor having both performance of corrosion resistance and a high radiation rate.
The turbo-molecular pump is characterized by the rotor having a nickel layer which is formed by electroless plating on a substrate composed of an aluminum alloy and an epoxy system resin layer which is formed by cation electrodeposition on the nickel layer.
Inventors:
KOBAYASHI YOSHIO
YASUI TOYOAKI
OKAMURA TOMOAKI
YASUI TOYOAKI
OKAMURA TOMOAKI
Application Number:
JP2006156642A
Publication Date:
September 07, 2006
Filing Date:
June 05, 2006
Export Citation:
Assignee:
MITSUBISHI HEAVY IND LTD
International Classes:
F04D19/04
Attorney, Agent or Firm:
Tadashi Takahashi
Masatake Shiga
Masakazu Aoyama
Masayu Horiuchi
Masatake Shiga
Masakazu Aoyama
Masayu Horiuchi