To provide a turbo-molecular pump preventing electrical run-out while suppressing cost increase.
The turbo-molecular pump includes a rotor 30 formed with multistage rotary blades 32, multistage stator blades 22 arranged alternately with the rotary blades 32 in the rotation axis direction, a shaft 12 having the rotor 30 fixed thereto and rotatively driven with a motor 36, magnetic bearings 37a, 37b, 38 magnetically floating the shaft 12, and eddy current type gap sensors 27a, 27b, 28 detecting a magnetically-floating position of the shaft 12, and includes target members 13, 14 made of non-magnetic metal as detection objects of radial sensors 27a, 27b and a rotor disc 15 formed of non-magnetic metal as a detection object of a thrust sensor 28. The target member 13 and the rotor disc 15 may be fixed detachably to the shaft 12.
