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Title:
TURBO-MOLECULAR PUMP
Document Type and Number:
Japanese Patent JP2011144712
Kind Code:
A
Abstract:

To provide a turbo-molecular pump preventing electrical run-out while suppressing cost increase.

The turbo-molecular pump includes a rotor 30 formed with multistage rotary blades 32, multistage stator blades 22 arranged alternately with the rotary blades 32 in the rotation axis direction, a shaft 12 having the rotor 30 fixed thereto and rotatively driven with a motor 36, magnetic bearings 37a, 37b, 38 magnetically floating the shaft 12, and eddy current type gap sensors 27a, 27b, 28 detecting a magnetically-floating position of the shaft 12, and includes target members 13, 14 made of non-magnetic metal as detection objects of radial sensors 27a, 27b and a rotor disc 15 formed of non-magnetic metal as a detection object of a thrust sensor 28. The target member 13 and the rotor disc 15 may be fixed detachably to the shaft 12.


Inventors:
Nishiyama, Kenichi
Application Number:
JP2010000004226
Publication Date:
July 28, 2011
Filing Date:
January 12, 2010
Export Citation:
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Assignee:
SHIMADZU CORP
International Classes:
F04D19/04; F04D27/00; F04D29/058; F16C32/04
Domestic Patent References:
2005-10-13
2008-07-03
2003-03-28
2001-07-27
1998-10-20



 
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