Title:
ターボ分子ポンプ
Document Type and Number:
Japanese Patent JP3562608
Kind Code:
B2
Inventors:
Tomoo Ota
Application Number:
JP23443196A
Publication Date:
September 08, 2004
Filing Date:
September 04, 1996
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
F04D27/00; F04D19/04; (IPC1-7): F04D27/00; F04D19/04
Domestic Patent References:
| JP3107599A | ||||
| JP4062393U |
Attorney, Agent or Firm:
Akio Shionoiri