Title:
TURBO-MOLECULAR PUMP
Document Type and Number:
Japanese Patent JP3781140
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce kinds of power units to a turbo-molecular pump body having various characteristics.
SOLUTION: In a turbo-molecular pump having a turbomolecular pump body 2 and a power unit 3 capable of transmitting/receiving a power and a signal to or from the turbo-molecular pump body 2, memory means ROM2f for storing a characteristic parameter of the turbo-molecular pump body 2 and transmission means (communication control circuit 2e) for transmitting the characteristic parameter to the turbomolecular pump body side are provided to the power unit 3 and receiving means (communication control circuit 3e) for receiving the characteristic parameter from the transmission means and control means 3b, 3c for controlling the turbomolecular pump body using the characteristic parameter are provided to the turbo-molecular pump body 2. A condition of performing a control of the turbo-molecular pump body 2 is set by the characteristic parameter from the power unit 3 side and the power units are used in common to thereby reduce the kind.
Inventors:
Osamu Ashida
Application Number:
JP26055496A
Publication Date:
May 31, 2006
Filing Date:
October 01, 1996
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
F04D15/00; F04D19/04; (IPC1-7): F04D15/00; F04D19/04
Domestic Patent References:
| JP9189327A | ||||
| JP7075364A | ||||
| JP4252883A |
Attorney, Agent or Firm:
Akio Shionoiri