Title:
TURBO-MOLECULAR PUMP
Document Type and Number:
Japanese Patent JP3874993
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a device having a means preventing a contact accident by clarifying a design criterion estimating the environmental change during operation of a turbo-molecular pump and accurately grasping temperature rising which is the main cause of the contact accident of a rotor blade wish a fixed blade.
SOLUTION: The design criterion is set so that the maximum value of differences between the thermal deformation amounts of the rotor blade and those of the fixed blade in heating/cooling treatment attendant on baking comes within the specified range. A means for adjusting temperature in a fixed part according to the temperature change of a rotating part by fixing a heating member to the fixed part is adopted so that temperatures in the rotating part and the fixed part are measured and the temperature difference comes within the specified range.
Inventors:
Makoto Sasaki
Yasuhiko Kasama
Tadahiro Ohmi
Yuichi Kinoshita
Yasuhiko Kasama
Tadahiro Ohmi
Yuichi Kinoshita
Application Number:
JP2000147035A
Publication Date:
January 31, 2007
Filing Date:
May 18, 2000
Export Citation:
Assignee:
ALPS ELECTRIC CO.,LTD.
Tadahiro Ohmi
boc edwards corporation
Tadahiro Ohmi
boc edwards corporation
International Classes:
F04D19/04; F04D29/04; F04D29/05; F04D29/059; F04D29/58; (IPC1-7): F04D19/04; F04D29/04; F04D29/58
Domestic Patent References:
| JP6012794U | ||||
| JP10299688A | ||||
| JP8338394A | ||||
| JP11148487A | ||||
| JP4127894U | ||||
| JP11280690A | ||||
| JP2000018189A | ||||
| JP10266991A | ||||
| JP9032793A | ||||
| JP8109896A | ||||
| JP9014184A | ||||
| JP11008774A | ||||
| JP10306790A | ||||
| JP11006774A |
Attorney, Agent or Firm:
Masatake Shiga