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Title:
TURBO MOLECULAR PUMP
Document Type and Number:
Japanese Patent JPH10159786
Kind Code:
A
Abstract:

To provide a turbo molecular pump which can be mass-produced with enhanced producibility, allows simplification of after-service, and which enables operation of various types of pump bodies using a single sort of power supply device.

A turbo molecular pump is composed of a pump body 2 equipped with a position sensor 7 to sense the position of a rotor and magnetic bearing to make feedback control of the magnetic force in conformity to the signal given by the sensor 7 and hold the rotor, a magnetic bearing control circuit 8 which is to hold the rotor in the central position through the feedback control conducted using signals from the position sensor 7, a magnetic bearing drive circuit 9, a motor drive circuit 12 to drive a motor 13 coupled with the rotor, and a power supply device 1 equipped with a magnetic bearing driving power supply 10 to supply power to the bearing drive circuit 9. Part or the whole of a circuit 3 to restrict the interchangeability between various types within one power supply device in use 1 is located on the side with the turbo molecular pump body 2.


Inventors:
TOYAMA KATSUHISA
Application Number:
JP1996000317876
Publication Date:
June 16, 1998
Filing Date:
November 28, 1996
Export Citation:
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Assignee:
MITSUBISHI HEAVY IND LTD
International Classes:
F04D19/04; F16C32/04; (IPC1-7): F04D19/04
Attorney, Agent or Firm:
鈴江 武彦 (外3名)



 
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