Title:
TURBO-MOLECULAR PUMP
Document Type and Number:
Japanese Patent JPS58148296
Kind Code:
A
Abstract:
A turbo-molecular pump has passive magnetic bearings which are radially stable but axially unstable and mechanical thrust bearings acting axially, the magnetic bearings and the stator forming a structural unit movable axially within the pump housing and connected to an element adjustably supporting one thrust bearing while the other thrust bearing is fixed to the housing with control gear being provided for adjusting the structural unit relative to the housing and the thrust bearing relative to the structural unit in dependence on force sensing devices.
Inventors:
BUIRI BETSUKAA
Application Number:
JP2138483A
Publication Date:
September 03, 1983
Filing Date:
February 10, 1983
Export Citation:
Assignee:
PFEIFFER VAKUUMTECHNIK
International Classes:
F04D19/04; F04D29/04; F04D29/046; F04D29/048; F04D29/058; (IPC1-7): F04D19/04
Foreign References:
| DE2825551A1 | 1979-12-13 |
Attorney, Agent or Firm:
Kyozo Yuasa