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Title:
TURBO VACUUM PUMP
Document Type and Number:
Japanese Patent JP2005194994
Kind Code:
A
Abstract:

To provide a turbo vacuum pump using a circumferential flow blade element, in which a large amount of flow rate exhaust can be implemented in the vacuum range from several Pa to tens of thousands of Pa.

The turbo vacuum pump is provided with the circumferential flow blade element 36 having a plurality of impeller blades 37 extending radially, a fixed blade 38 having a circumferential groove 4 extending circumferentially, and a casing 10 storing the circumferential flow blade element 36 and the fixed blade 38. The fixed blade 38 has an opening 42 to introduce gas. A suction passage 41 to transfer and introduce the gas introduced from the opening 42 radially outward into the circumferential groove 4 is formed at least at one side of the circumferential flow blade 36 and the fixed blade 38.


Inventors:
Kawasaki, Hiroyuki
Application Number:
JP2004000149553
Publication Date:
July 21, 2005
Filing Date:
May 19, 2004
Export Citation:
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Assignee:
EBARA CORP
International Classes:
F04D19/04; F04D23/00; (IPC1-7): F04D19/04; F04D23/00
Attorney, Agent or Firm:
渡邉 勇
堀田 信太郎
小杉 良二
森 友宏



 
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