To provide a turvo vacuum pump which can be restarted with a small starting torque even when product is adhered to a fine gap between a rotor and a stator.

A centrifugal compression pump stage 4a of a rotor 1 is arranged on the side of an intake port 6, while a circumferential flow compression pump stage 4b is arranged on the side of an exhaust port 12. Vanes are formed on both sides of discs projected from the circumferential flow compression pump stage 4b into fluid passages. An inner diameter of the vane is substantially equalized to a boss diameter of the circumferential flow compression pump stage 4b. An opposed area of a fine gap between the rotor 1 and a stator 2 is minimized. It is thus possible to reduce an area to that product is adhered and restart the rotor with a low torque.