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Title:
TURBOMOLECULAR PUMP
Document Type and Number:
Japanese Patent JP2013185577
Kind Code:
A
Abstract:

To reduce a quick stop torque when a rotor blade is broken without upsizing a casing member.

A lower cylinder part 4a is formed in an inner peripheral side of a rotor blade 6a at the lowermost step of a rotor 4 housed in a casing member 12. A cushioning member 20 against which the chips of the rotor blade 6a collide when the rotor blade 6a is broken is coupled to a base 13, or integrally arranged with the base 13, in the outer periphery side of the lower cylinder part 4a, thereby a timing when the impact of chips not colliding against the cushioning member 20 is transmitted to the casing member 12 and a timing when the impact of chips colliding against the cushioning member 20 is transmitted to the casing are shifted.


Inventors:
ONISHI TAKUTO
Application Number:
JP2012054346A
Publication Date:
September 19, 2013
Filing Date:
March 12, 2012
Export Citation:
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Assignee:
SHIMADZU CORP
International Classes:
F04D19/04
Domestic Patent References:
JP2008002302A2008-01-10
JP2008286013A2008-11-27
JP2004324605A2004-11-18
JP2008002302A2008-01-10
JP2008286013A2008-11-27
JP2004324605A2004-11-18
Attorney, Agent or Firm:
Fuyuki Nagai



 
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