Title:
TURBOMOLECULAR PUMPS
Document Type and Number:
Japanese Patent JPS51116415
Kind Code:
A
Abstract:
The driven shaft (10) of the high-pressure gas turbine (9) of the turbomolecular drag pump is connected in a non-positive manner to the rotor shaft (7) which carries the pump rotor (1) and which is supported in the pump casing by means of a pneumatic bearing (8). In order to seal the pneumatic bearing against the vacuum chamber, the rotor shaft (7) is surrounded by the shaft gland (11) whose sealing effect is achieved by means of a magnetic sealing fluid which is held in position magnetically. Connected to at least one of the gas outlets of the pneumatic bearing (8) there are gas ducts (13, 14, 15) which pass the gas intended for the cooling of the shaft gland (11) into the region of the gland and outwards. The turbomolecular drag pump is used to generate pressures of from approximately 10<-3> to 10<-9> torr. It is particularly suitable as a gas collection pump on equipment for gas analysis.
Inventors:
KARURU HAINTSU KURATSUTO
ETSUKARUTO KIYUTSUSERU
ETSUKARUTO KIYUTSUSERU
Application Number:
JP3001876A
Publication Date:
October 13, 1976
Filing Date:
March 22, 1976
Export Citation:
Assignee:
KERNFORSCHUNGSANLAGE JUELICH
International Classes:
F04D19/04; F04D25/14; (IPC1-7): F04D19/04