PURPOSE: To prevent the stick slip and backlash by regulating the minute variation of a rotary body in the radial direction on minute revolution by leaf springs, on a turning apparatus used for positioning the light exposure apparatus such as high-density semiconductor apparatus, etc.
CONSTITUTION: A piezoelectric element 23 is fixed between a turning-means installation board 13 fixed onto a rotary basic board 10 and a turning lever 21 installed onto a turning board 14, and arranged so as to be extended and contracted in the direction of θ-revolution. The minute displacement in the radial direction of the turning board 14 is regulated by regulating the center of revolution by using a bearing 16 at the center of the revolution of the turning board 14, and the turning board 14 and the turning-board basic board 10 are connected by four leaf springs 14a, 14b, 14c, and 14d, and the stick slip on minute revolution and the backlash on varying the direction of revolution are gregulated and the turning of a turning board 15 with high precision is permitted by the elastic deformation through the application of the deflection stress onto the leaf springs and turning the turning board 15.
MATSUMURA RYUKICHI
NOMURA NOBORU
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