To provide a two-axis capacitive acceleration sensor that can suppress the occurrence of another axis sensitivity without enlarging the size of the sensor, and has high linearity.
The two-axis capacitive acceleration sensor includes a substrate 110 where one or more X-axis fixed electrodes 111 and one or more Y-axis fixed electrodes 112 are formed on the same plate surface, and a structure 120. The structure 120 has a frame 121 that is facedly arranged to the substrate 110 in parallel and is disposed at the outer rim, an X-axis movable electrode 123 that is displaceably supported in the X axis direction by a plurality of beams 122 inside the flame 121, and establishes a predetermined relation between the displacement in the X axis direction and the variation of the area facing the X-axis fixed electrodes 111, and a Y-axis movable electrode 125 that is displaceably supported in the Y axis direction by a plurality of beams 124 inside the X-axis movable electrode 123, and establishes a predetermined relation between the displacement in the Y axis direction and the variation of the area facing the Y-axis fixed electrodes 112.
| JPH09292409A | 1997-11-11 | |||
| JP2006084477A | 2006-03-30 | |||
| JP2003270265A | 2003-09-25 |
Yukio Nakamura
Taku Kusano
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