Title:
TWO-DIMENSIONAL DEFORMATION DETECTION DEVICE
Document Type and Number:
Japanese Patent JP2527877
Kind Code:
B2
Abstract:
PURPOSE: To obtain a two-dimensional deformation detection device which does not need any scanning system and can perform measurement in a short time.
CONSTITUTION: A laser light source 58 causes a displacement to be produced on the surface by laser beam to an object 61 to be measured. First and second light heterodyne interference means 51 and 52 convert a first two-dimensional light phase information regarding the surface to be measured of the object 61 to be measured and a second two-dimensional light phase information which becomes a reference to first and second two-dimensional signals on a specified time carrier frequency. First and second threshold elements 53 and 54 convert these into two-dimensional binary-coded light information. A light logic operation element 56 takes these through a beam splitter 55 and generates a two-dimensional logical product light signal between pieces of binary-coded light information. A two-dimensional integral element 57 integrates two-dimensional logic integral light signal.
Inventors:
Sone, Akihiro
Matsumoto, Osamu
Kobayashi, Yuji
Hara, Tsutomu
Matsumoto, Osamu
Kobayashi, Yuji
Hara, Tsutomu
Application Number:
JP3204092A
Publication Date:
August 28, 1996
Filing Date:
February 19, 1992
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK
International Classes:
G01B9/02; G01B11/16; (IPC1-7): G01B11/16; G01B9/02
Domestic Patent References:
| JP4124050B | ||||
| JPH0532283A | ||||
| JP4127132B | ||||
| JP1168140B |
Attorney, Agent or Firm:
長谷川 芳樹 （外３名）